Reference 1

J.F. Seely, L.I. Goray, D.L. Windt, Yu.A. Uspenskii, A.V. Vinogradov, B. Kjornrattanawanich, SPIE 5538 (2004) 43.

LINK

Reference 2

H. Kierey, K. Heidemann, B. Kleemann, R. Winters, W. Egle, W. Singer, F. Melzer, R. Wevers, M. Antoni, SPIE 5193 (2004) 70.

LINK

Reference 3

I.G. Kuznetsov, E. Wilkinson, D.A. Content, R.A. Boucarut, T.J. Madison, SPIE 5178 (2004) 267.

LINK

Reference 4

J.F. Seely, Yu.A. Uspenskii, Yu.P. Pershin, V.V. Kondratenko, A.V. Vinogradov, AO 41 (10) (2002) 1846.

LINK

Reference 6

D.A. Content, P. Arsenovic, I.G. Kuznetsov, T. Hadjimichael, SPIE 4485 (2001) 405.

LINK

Reference 7

W.R. Hunter, M.P. Kowalski, J.C. Rife, R.G. Gruddace, AO 40 (34) (2001) 6157.

LINK

Reference 8

M. Saillard, E. Popov, L. Tsonev, L. Scandella, N. Kruse, AO 34 (22) (1995) 4883.

LINK

Reference 11

E. Palik, ed., Handbook of optical constant of solids, II, III, Acad. Press, N.Y., 1985, 1991, 1998.

LINK

Reference 12

American Institute of Physics, Handbook, McGraw-Hill, N.Y. 1972.

LINK

Reference 13

J.F. Seely, L.I. Goray, W.R. Hunter, J.C. Rife, AO 38 (7) (1999) 1251.

LINK

Reference 14

E. Lowen, D. Maystre, E. Popov, L. Tsonev, AO 34 (10) (1995) 1707.

LINK

Reference 18

L.I. Goray, I.G. Keznetsov, S.Yu. Sadov, D.A. Content, JOSA A 23 (1) (2006) 55.

LINK

Reference 19

Example for sources for NIST-traceable height standards is VLSI Standards.

LINK

Reference 20

Example for sources for NIST-traceable height standards is Ultrasharp.

LINK

Reference 23

J. Bennett, L. Mattson, Introduction to Surface Roughness and Scattering, 2nd ed., OSA, Washington, D.C., 1999.

LINK

Reference 24

J.V. Bixler, C.J. Hailey, C.W. Mauche, P.F. Teague, R.S. Thoe, S.M. Kahn, F.B.S. Paerels, SPIE 1549 (1991) 420.

LINK

Reference 25

T. Hessler, M. Rossi, R.E. Hunz, M.T. Gale, AO 37 (19) (1998) 4069.

LINK

Reference 26

K. Osterried, K.F. Heidermann, B. Nelles, AO 37 (34) (1998) 8002.

LINK

Reference 27

P. Mouroulis, D.W. Wilson, P.D. Maker, and R.E. Muller, AO 37 (31) (1998) 7200.

LINK

Reference 28

P. Laakkonen, M. Kuitten, J. Simonen, J. Turunen, AO 39 (19) (2000).

LINK

Reference 29

M.P. Kowalski, J.F. Seely, L.I. Goray, W.R. Hunter, J.C. Rife, AO 36 (34) (1997) 8939.

LINK

Reference 30

J.F. Seely, M.P. Kowalski, R.G. Cruddace, K.F. Heidemann, U. Heinzmann, U. Kleineberg, K. Osterried, D. Menke, J.C. Rife, W.R. Hunter, AO 36 (31) (1997) 8206.

LINK

Reference 31

M.P. Kowalski, T.W. Barbee, K.F. Heidermann, H. Gursky, J.C. Rife, W.R. Hunter, G.G. Fritz, R.G. Cruddace, AO 38 (31) (1999) 6487.

LINK

Reference 32

E.G. Loewen, E. Popov, Diffraction Gratings and Applications, Marcel Dekker, New York, 1997.

LINK

Reference 33

M.C. Hutley, Diffraction Gratings, Academic Press, London, 1982.

LINK

Reference 34

C.J. Raymond, M.R. Murnane, S. Sohail, H. Naqvi, J.R. McNeil, JVST B 13 (4) (1995) 1484.

LINK

Reference 35

C.J. Raymond, M.R. Murnane, S.L. Prins, S. Sohail, H. Naqvi, J.R. McNeil, J.W. Hosch, JVST B 15 (2) (1997) 361.

LINK

Reference 36

C.J. Raymond, S. Sohail, H. Naqvi, J.R. McNeil, SPIE 3050 476 (1997).

LINK

Reference 37

C. Palmer, ed., Diffraction Gratings Handbook, 6th ed., Newport Corp. Press, Rochester, 2005.

LINK

Reference 38

I.G. Kuznetsov, D.A. Content, R.A. Boucarut, T.J. Madison, SPIE 4485 (2001) 417.

LINK

Reference 39

J.F. Seely, NRL extreme ultraviolet and soft X-ray calibration facility at the National Synchrotron Light Source, SSD NRL, Washington DC, 2004.

LINK

Reference 40

J.C. Rife, H.R. Sadeghi, W.R. Hunter, RSI 60 (7) (1989) 2064.

LINK

Reference 41

M. Born, E. Wolf, Principles of Optics, 7th edition, University Press, Cambridge, 1999.

LINK

Reference 42

R. Petit, ed., Electromagnetic Theory of Gratings, Springer, Berlin, 1980.

LINK

Reference 44

B. Kleemann, A. Mitreiter, F. Wyrowski, JMO 43 (7) (1996) 1323.

LINK

Reference 45

M. Neviere, E. Popov, Light Propagation in Periodic Media: Differential Theory and Designin, Marcel Dekker, New York, 2002.

LINK

Reference 46

L.C. Botten, M.S. Craig, R.C. McPhedran, J.L. Adams, J.R. Andrewartha, OA 28 (8) (1981) 1087.

LINK

Reference 49

M.G. Moharam, D.A. Pommet, E.B. Grann, T.K. Gaylord, JOSA A 12 (5) (1995) 1077.

LINK

Reference 52

T.W. Preist, N.P.K. Cotter, J.R. Sambles, JOSA A 12 (8) (1995) 1740.

LINK

Reference 53

L. Li, J. Chandezon, G. Granet, J-P. Plumey, AO 38 (2) (1999) 304.

LINK

Reference 57

C.M. Friedrich, L. Mader, A. Erdmann, S. List, R.L. Gordon, C.K. Kalus, U.A. Griesinger, R. Pforr, J. Mathuni, G.G. Ruhl, W. Maurer, SPIE 4000 (2000) 1323.

LINK

Reference 58

J.M. Bendickson, E.N. Glytsis, T.K. Gaylord, D.L. Brundrett, JOSA A 18 (8) (2001) 1912.

LINK

Reference 59

Ch. Hafner, The Generalized Multipole Technique for Computational Electromagnetics, Artech House Books, Boston, 1990.

LINK

Reference 66

K.E. Atkinson, The numerical solution of integral equations of the second kind, Cambridge Univ. Press, Cambridge, 1997.

LINK

Reference 67

M. Abramowitz, I.A. Stegun, eds., Handbook of mathematical functions, Nat. Bureau of Standards, 1964.

LINK

Reference 68

E. Popov, B. Bozhkov, D. Maystre, J. Hoose, AO 38 (1) (1999) 47.

LINK

Reference 69

E. Popov, B. Chernov, M. Neviere, N. Bonod, JOSA A, 21 (2) (2004) 199.

LINK

Reference 72

D.A. Content, R.A. Boucarut, C.W. Bowers, L.K. Huang, T.A. Norton, et al., SPIE 2807 (1996) 267.

LINK

Reference 73

J.F. Seely, L.I. Goray, B. Kjornrattanawanich, et al., SPIE 5900 (2005) 73.

LINK

Reference 75

L. I. Goray, J. F. Seely, and S. Yu. Sadov, J. Appl. Phys. 100 (2006) 094901 .

LINK

Reference 76

J.F. Seely, C. Montcalm, S. Baker, and S. Bajt, AO 40 (2001) 5565.

LINK

Reference 77

D.G. Stearns, D.P. Gaines, D.W. Sweeney, and E.M. Gullikson, J. Appl. Phys. 84 (1998) 1003.

LINK

Reference 78

J. F. Seely, C. M. Brown, D. L. Windt, S. Donguy, and B. Kjornrattanawanich, AO 43 (2004) 1463 .

LINK

Reference 79

D. L. Windt, S. Donguy, J. Seely, and B. Kjornrattanawanich, AO 43 (2004) 1935.

LINK

Reference 80

C. Tarrio, R. Watts, T. Lucatorto, J. Slaughter, and C. Falco, AO 37 (1998) 4100.

LINK

Reference 82

D. L. Voronov, M. Ahn, E. H. Anderson, R. Cambie, Ch.-H. Chang, L. I. Goray, et al., Proc. SPIE 7802 (2010) 780207.

LINK