J. F. Seely, Yu. A. Uspenskii, Yu. P. Pershin, V.V. Kondratenko, and A. V. Vinogradov, “Skylab 3600 groove/mm replica grating with a scandium-silicon multilayer coating and high normal-incidence efficiency at 38-nm wavelength,” Appl. Opt., vol.41, No. 10, 2002, pp. 1846-1851.


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