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References
Reference 19
D. L. Voronov, E. H. Anderson, R. Cambie, L. I. Goray, P. Gawlitza, E. M.Gullikson, F. Salmassi, T. Warwick, V. V. Yashchuk, H. A. Padmore, “Development of near atomically perfect diffraction gratings for EUV and soft x-rays with very high efficiency and resolving power,” Journal of Physics: Conference Series C, vol. 425, 2013, pp. 152006-1–4.
Reference 20
W. R. Hunter, M. P. Kowalski, J. C. Rife, and R. G. Gruddace, "Investigation of the properties of an ion-etched plane laminar holographic grating," Appl. Opt., vol. 40, No. 34, 2001, pp. 6157-6165.
Reference 21
T. C. Blasiak and S. L. Zheleznyak, "Diffraction grating having enhanced blaze performance at two wavelengths," United State Patent No. 6,067,197, Spectronic Instruments, Inc., May 23, 2000.
Reference 22
L. I. Goray, "Off-plane grazing-incidence fan-groove blazed grating to serve as a high-efficiency spectral purity filter for EUV lithography," in Advances in X-Ray/EUV Optics, Components, and Applications, A. M. Khounsary and C. Morawe, eds., SPIE Proc., vol. 6317, 2006., pp. 0O-1-9.
Reference 23
L. I. Goray, "Modified integral method and real electromagnetic properties of echelles," in Diffractive and Holographic Technologies for Integrated Photonic Systems, R. I. Sutherland, D. W. Prather, and I. Cindrich, eds., SPIE Proc., vol. 4291, 2001, pp. 13-24.
Reference 24
M. R. Haas, E. F. Erickson, J. A. Baltz, S. W. J. Colgan, D. H. Lynch, J. McGuire, R. K. Pina, T. L. Roellig, J. P. Simpson, C. M. Telesco, J. Wolf, and E. T. Young, "Preliminary optical design of AIRES: an airborne infrared echelle spectrometer for SOFIA," in Infrared Astronomical Instrumentation, A. M. Fowler, ed., SPIE Proc., vol. 3354, 1998, pp. 940-951.
Reference 25
A. Rathsfeld, G. Schmidt, and B. H. Kleemann, "On a Fast Integral Equation Method for Diffraction Gratings," Commun. Comput. Phys., vol. 1, No. 6, 2006, pp. 984-1009.
Reference 26
N. Dechamps, N. de Beaucoudrey, C. Bourlier, and S. Toutain, “Fast numerical method for electromagnetic scattering by rough layered interfaces: Propagation-inside-layer expansion method," J. Opt. Soc. Am. A, vol. 23, No. 2, 2006, pp. 359-369.
Reference 27
Diffraction Gratings Handbook, C. Palmer, ed., 6th, Newport Corp. Press, Rochester, 2005, 265 p.
Reference 28
Light Propagation in Periodic Media: Differential Theory and Design, M. Neviere and E. Popov, in Optical Engineering Series/81, Marcel Dekker, New York - Basel, 2002, 410 p.

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