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References
Reference 6
L. I. Goray and J. F. Seely, "Efficiencies of master, replica, and multilayer gratings for the soft x-ray - EUV range: modeling based on the modified integral method and comparisons to measurements," Appl. Opt., vol. 41, No. 7, 2002, pp. 1434-1445.
Reference 7
L. I. Goray, "Modified integral method for weak convergence problems of light scattering on relief grating," in Diffractive and Holographic Technologies for Integrated Photonic Systems, R.I. Sutherland, D.W. Prather, and I. Cindrich, eds., SPIE Proc., vol. 4291, 2001, pp.1-12.
Reference 8
J. F. Seely, G. E. Holland, J. C. Bremer, T. J. Zukowski, M. Feser, Y. Feng, B. Kjornrattanawancih, and L. I. Goray, "Measurement of Zone Plate Efficiencies in the Extreme Ultraviolet and Applications to Radiation Monitors for Absolute Spectral Emission," in Advances in X-Ray/EUV Optics, Components, and Applications, A. M. Khounsary and C. Morawe, eds., SPIE Proc., vol. 6317, 2006., pp. 0N-1-8.
Reference 9
J. F. Seely, L. I. Goray, B. Kjornrattanawanich, J. M. Laming, G. E. Holland, K. A. Flanagan, R. K. Heilmann, C.-H. Chang, M. L. Schattenburg, and A. P. Rasmussen, "Efficiency of a grazing incidence off-plane grating in the soft x-ray region," Appl. Opt., vol. 45, No. 8, 2006, pp. 1680-1687.
Reference 10
M. P. Kowalski, R. K. Heilmann, M. L. Schattenburg, C.-H. Chang, F. B. Berendse, and W. R. Hunter, "Near-normal-incidence extreme-ultraviolet efficiency of a flat crystalline anisotropically etched blazed grating," Appl. Opt., vol. 45, No. 8, 2006, pp. 1676-1679.
Reference 11
L. I. Goray, "Grazing incidence off-plane lamellar grating as a beam splitter for a 1-Å free electron laser," Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques, vol. 2, No. 5, 2008, pp. 796–800.
Reference 12
L. I. Goray, N. I. Chkhalo, and G. E. Tsyrlin, "Determining angles of incidence and heights of quantum dot faces by analyzing X-ray diffuse and specular scattering," Technical Physics, vol. 54, No. 4, 2009, pp. 561–568.
Reference 13
J. F. Seely, L. I. Goray, D. L. Windt, B. Kjornrattanawanich, Yu. A. Uspenskii, and A. V. Vinogradov, "Extreme ultraviolet optical constants for the design and fabrication of multilayer gratings," in Optical Constants of Materials for UV to X-Ray Wavelengths; R. Soufli and J. F. Seely; eds., SPIE Proc., vol. 5538, 2004, pp. 43-52.
Reference 14
I. G. Kuznetsov, E. Wilkinson, D. A. Content, R. A. Boucarut, and T. J. Madison, "Grating efficiencies comparison study: calculations versus metrology for various types of high groove density gratings at VUV-UV wavelengths," in Optical Modeling and Performance Predictions, M. A. Kahan, ed., SPIE Proc., vol. 5178, 2004, pp. 267-277.
Reference 15
C.-H. Chang, J. C. Montoya, M. Akilian, A. Lapsa, M. Li, K. A. Flanagan, A. P. Rasmussen, J. F. Seely, J. M. Laming, B. Kjornrattanawanich, and L. I. Goray, "High fidelity blazed grating replication using nanoimprint lithography," J. Vac. Sci. Technol. B, vol. 22, No. 6, pp. 3260-3264, 2004.

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