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Fig.21. The NRL beamline X24C attached to the NSLS X-ray ring.
Fig.22. The synchrotron radiation is dispersed by a monochromator that has a resolving power up to 1000 and 108 to 1012 photons/sec/0.1% bandpass peaking at ~ 100 eV. Thin filters are suppressed the radiation from the monochromator in the higher harmonics. The wavelength scale is established by the geometry of the monochromator and the absorption edges of the filters. Two elements (e.g. grating and mirror) are precisely translated and rotated by computer control while maintaining fixed entrance and exit slits. Gratings are selected without breaking vacuum and cover from 1 keV through the visible. The radiation is 90% polarized with the electric field vector in the plane of the storage ring.
Fig.23. A photograph of the reflectometer, the photodiode chamber, and the larger instrument calibration chamber attached to the X24C beamline.
Fig.24. Efficiency of –1 order of a 2400 g/mm blazed holographic master grating computed with the average AFM groove profile of 7.0 nm depth and RI of SiO2 taken from the CXRO compilation for different calculation modes vs. wavelength.
Fig.25. Measured and calculated efficiency of –1 order of a 2400 g/mm blazed holographic master grating, plotted vs. wavelength. Efficiency models calculated for different groove profiles and RI of SiO2 taken from the CXRO compilation.
Fig.26. Measured and calculated efficiency of –1 order of a 2400 g/mm blazed holographic master grating, plotted vs. wavelength. Efficiency models calculated for scaled AFM groove profiles and RI of SiO2 taken from different sources.
Fig.27. Measured and calculated efficiency of orders of a 2400 g/mm blazed holographic master grating, plotted vs. wavelength. Efficiency model calculated for the average AFM groove profile of 7.0 nm depth and RI of SiO2 taken from the CXRO compilation.
Fig.28. The efficiency certificate of orders of a 2400 g/mm blazed holographic concave master grating working in the soft X-ray–EUV range. Efficiency calculated for the average AFM groove profile of 7.0 nm depth and RIs of SiO2 taken from the CXRO compilation.
Fig.29. (a) The measured grating efficiency in the zero order at an angle of incidence of 15.2°. (b) The reflectance of 743 Ε of SiO2 and 30 Ε of Al2O3 on opaque aluminum calculated at an angle of incidence of 15.2°.
Fig.30. The fit of Gaussian profiles (smooth curves) to the measured grating efficiencies (data points). The wavelength of the incident radiation was 187.9 Ε, and the angle of incidence was 15.2°.
Fig.21. NRL beamline X24C attached to NSLS X-ray ring
Fig.21. NRL beamline X24C attached to NSLS X-ray ring
Fig.22. X24C beamline monochromator geometry
Fig.22. X24C beamline monochromator geometry
Fig.23. Calibration chambers attached to the X24C beamline
Fig.23. Calibration chambers attached to the X24C beamline
Fig.24. Calculated efficiency of –1 order of 2400/mm holographic master grating
Fig.24. Calculated efficiency of –1 order of 2400/mm holographic master grating
Fig.25. Measured and calculated efficiency of –1 order of 2400/mm holographic master grating
Fig.25. Measured and calculated efficiency of –1 order of 2400/mm holographic master grating
Fig.26. Measured and calculated efficiency of –1 order of 2400/mm holographic master grating
Fig.26. Measured and calculated efficiency of –1 order of 2400/mm holographic master grating
Fig.27. Measured and calculated efficiency of orders of 2400/mm holographic master grating
Fig.27. Measured and calculated efficiency of orders of 2400/mm holographic master grating
Fig.28. Efficiency certificate of orders of 2400/mm holographic master grating
Fig.28. Efficiency certificate of orders of 2400/mm holographic master grating
Fig.29. (a) Measured grating efficiency in 0 order; (b) reflectance of SiO2 and Al2O3 on opaque Al
Fig.29. (a) Measured grating efficiency in 0 order; (b) reflectance of SiO2 and Al2O3 on opaque Al
Fig.30. Fit of Gaussian profiles (smooth curves) to measured grating efficiencies (data points)
Fig.30. Fit of Gaussian profiles (smooth curves) to measured grating efficiencies (data points)

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